Rinaldi, Matteo

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Disciplines
Acoustics, Dynamics, and Controls
Electrical and Electronics
Electro-Mechanical Systems
Electronic Devices and Semiconductor Manufacturing
Nanoscience and Nanotechnology
Nanotechnology Fabrication
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Position
Ph.D. Candidate
Introduction
Matteo Rinaldi is currently Ph.D. Candidate (expected 2010) in the department of Electrical and Systems Engineering at the University of Pennsylvania. He is Graduate Research Fellow in Prof. Piazza's Group (PMaNS) and his research activity focuses on: Micro/Nano AlN piezoelctric gravimetric sensors for multiple VOC detection. Nano-sensitive layers for enhanced gas vapors adsorbtion. Super High Frequency (SHF) NanoElectroMechanical resonators for RF and sensing applications. For additional information please visit my personal homepage: http://www.seas.upenn.edu/~rinaldim/index.html
Research Interests

Search Results

Now showing 1 - 10 of 14
  • Publication
    Ultra-Thin-Film AlN Contour-Mode Resonators for Sensing Applications
    (2010-04-01) Rinaldi, Matteo; Zuniga, Chiara; Piazza, Gianluca
    This paper reports on the design and experimental verification of a new class of ultra-thin-film (250 nm) aluminum nitride (AlN) microelectromechanical system (MEMS) contour mode resonators (CMRs) suitable for the fabrication of ultra-sensitive gravimetric sensors. The device thickness was opportunely scaled in order to increase the mass sensitivity, while keeping a constant frequency of operation. In this first demonstration the resonance frequency of the device was set to 178 MHz and a mass sensitivity as high as 38.96 KHz⋅μm2/fg was attained. This device demonstrates the unique capability of the CMR-S technology to decouple resonance frequency from mass sensitivity.
  • Publication
    GHz Range Nanoscaled AlN Contour-Mode Resonant Sensors (CMR-S) with Self-Sustained CMOS Oscillator
    (2010-06-01) Rinaldi, Matteo; Zuniga, Chiara; Zuo, Chengjie; Piazza, Gianluca
    This paper reports on the design and experimental verification of a new class of nanoscaled AlN Contour-Mode Resonant Sensors (CMR-S) for the detection of volatile organic chemicals (VOC) operating at frequencies above 1 GHz and connected to a chip-based CMOS oscillator circuit for direct frequency read-out. This work shows that by scaling the CMR-S to 250 nm in thickness and by operating at high frequencies (1 GHz) a limit of detection of ~35 zg/µm2 and a fast response time (<1 >ms) can be attained. In addition, the capability to detect concentrations of volatile organic compounds such as 2,6 dinitroluene (DNT) as low as 1.5 ppb (4.7 ag/µm2) is experimentally verified.
  • Publication
    DNA-Decorated Carbon Nanotubes as Sensitive Layer for AlN Contour-Mode Resonant-MEMS Gravimetric Sensor
    (2009-01-25) Zuniga, Chiara; Rinaldi, Matteo; Khamis, Samuel M; Jones, Timothy S; Johnson, A T; Piazza, Gianluca
    In this work a nano-enabled gravimetric chemical sensor prototype based on single-stranded DNA (ss-DNA) decorated single-walled carbon nanotubes (SWNT) as nano-functionalization layer for Aluminun Nitride (AIN) contour-mode resonant-MEMS gravimetric sensors has been demonstrated. Two resonators fabricated on the same silicon chip and operating at different resonance frequencies, 287 and 450 MHz, were functionalized with this novel bio-coating layer to experimentally prove the capability of two distinct single strands of DNA bound to SWNT to enhance differently the adsorption of volatile organic compounds such as dinitroluene (DNT, simulant for explosive vapor) and dymethyl-methylphosphonate (DMMP, a simulant for nerve agent sarin). The introduction of this bio-coating layer addresses the major drawbacks of recovery time (50% recovery in less than 29 seconds has been achieved) and lack of selectivity associated with gas sensor based on polymers and pristine carbon nanotube functionalization layers.
  • Publication
    AlN Contour-Mode Resonators for Narrow-Band Filters above 3 GHz
    (2009-04-20) Rinaldi, Matteo; Zuniga, Chiara; Zuo, Chengjie; Piazza, Gianluca
    This paper reports on the design and experimental verification of a new class of thin-film (250 nm) super high frequency (SHF) laterally-vibrating piezoelectric microelectromechanical (MEMS) resonators suitable for the fabrication of narrow-band MEMS filters operating at frequencies above 3 GHz. The device dimensions have been opportunely scaled both in the lateral and vertical dimensions in order to excite a contour-extensional mode of vibration in nano features of an ultra-thin (250 nm) aluminum nitride (AlN) film. In this first demonstration two-port resonators vibrating up to 4.5 GHz were fabricated on the same die and attained electromechanical coupling, kt^2, in excess of 1.5 %. These devices were employed to synthesize the highest frequency ever reported MEMS filter (3.7 GHz) based on AlN contour-mode resonator (CMR) technology.
  • Publication
    Power Handling and Related Frequency Scaling Advantages in Piezoelectric AlN Contour-Mode MEMS Resonators
    (2009-09-01) Zuo, Chengjie; Rinaldi, Matteo; Piazza, Gianluca
    This paper reports on the analytical modeling and experimental verification of the mechanically-limited power handling and nonlinearity in piezoelectric aluminum nitride (AlN) contour-mode resonators (CMR) having different electrode configurations (thickness field excitation, lateral field excitation, one-port and two-port configurations) and operating at different frequencies (177-3047 MHz). Despite its simplicity, the one-dimensional analytical model fits the experimental behavior of AlN CMRs in terms of power handling capabilities. The model and experiment also confirm the advantage of scaling (i.e. miniaturizing) the AlN CMRs to higher frequencies at which higher critical power density can be more easily attained up to values in excess of 10 μW/μm3.
  • Publication
    Nanoscaled Piezoelectric Aluminum Nitride Contour- Mode Resonant Sensors
    (2010-11-01) Piazza, Gianluca; Rinaldi, Matteo; Zuniga, Chiara
    This paper reports on a new class of nanoscaled piezoelectric aluminum nitride contour-mode resonant sensors (CMR-S) that have been developed for the gravimetric detection of volatile organic chemicals (VOC). The use of the CMR-S and its scaling for the making of large arrays of detectors is justified in terms of the superior sensitivity and limit of detection (LOD ~ zg/μm2) that this technology attains with respect to any other available acoustic device. The choice of a novel functionalization layer based on ss-DNA is introduced as an effective way to selectively detect multiple VOCs without altering the electromechanical characteristics of the resonator. Experimental results confirming the advantages of scaling the device dimensions and its frequency of operation in terms of improved LOD and measurement speed are presented. Furthermore, preliminary data showing selective detection of dymethyl-methylphosphonate (DMMP) and dinitroluene (DNT) (with LOD in the order of ppt) are reported.
  • Publication
    5-10 GHz AlN Contour-Mode Nanoelectromechanical Resonators
    (2009-01-01) Rinaldi, Matteo; Zuniga, Chiara; Piazza, Gianluca
    This paper reports on the design and experimental verification of Super High Frequency (SHF) laterally vibrating NanoElctroMechanical (NEMS) resonators. For the first time, AlN piezoelectric nanoresonators with multiple frequencies of operation ranging between 5 and 10 GHz have been fabricated on the same chip and attained the highest f-Q product (4.6E12 Hz) ever reported in AlN contour-mode devices. These piezoelectric NEMS resonators are the first of their class to demonstrate on-chip sensing and actuation of nanostructures without the need of cumbersome or power consuming excitation and readout systems. Effective piezoelectric activity has been demonstrated in thin AlN films having vertical and lateral features in the range of 250 nm.
  • Publication
    Super-High-Frequency Two-Port AlN Contour-Mode Resonators for RF Applications
    (2010-01-01) Rinaldi, Matteo; Zuniga, Chiara; Zuo, Chengjie; Piazza, Gianluca
    This paper reports on the design and experimental verification of a new class of thin-film (250 nm) superhigh- frequency laterally-vibrating piezoelectric microelectromechanical (MEMS) resonators suitable for the fabrication of narrow-band MEMS filters operating at frequencies above 3 GHz. The device dimensions have been opportunely scaled both in the lateral and vertical dimensions to excite a contourextensional mode of vibration in nanofeatures of an ultra-thin (250 nm) AlN film. In this first demonstration, 2-port resonators vibrating up to 4.5 GHz have been fabricated on the same die and attained electromechanical coupling, kt^2, in excess of 1.5%. These devices are employed to synthesize the highest frequency MEMS filter (3.7 GHz) based on AlN contour-mode resonator technology ever reported.
  • Publication
    Use of a Single Multiplexed CMOS Oscillator as Direct Frequency Read-Out for an Array of Eight AlN Contour-Mode NEMS Resonant Sensors
    (2010-11-01) Rinaldi, Matteo; Zuniga, Chiara; Duick, Brandon; Piazza, Gianluca
    This paper reports on the first demonstration of a single multiplexed CMOS oscillator circuit employed as direct frequency readout for an array of 8 nanoscaled aluminum nitride Contour-Mode Resonant Sensors (CMR-S). In this first prototype 8 thin-film (250 nm) AlN CMR-S operating at 186 MHz were fabricated on the same chip and simultaneously wire-bonded to a Pierce-like oscillator circuit (fabricated in the ON Semiconductor 0.5 µm CMOS process) by means of 8 CMOS transmission gates addressed via a 3 bit on-chip decoder. The 8 CMR-S were simultaneously exposed to different concentrations of methanol (0.1–1% of the saturated vapor pressure) and their response was monitored in a time-multiplexed mode. Frequency shifts of 300 Hz corresponding to changes of mass per unit area of 7 ag/µm2 were experimentally detected. Values of phase noise derived Allan deviation as low as 0.9 Hz were measured. Such Allan deviation translates in an estimated limit of detection of 21 zg/µm2.
  • Publication
    ss-DNA Functionalized Ultra-Thin-Film AlN Contour-Mode Resonators with Self-Sustained Oscillator for Volatile Organic Chemical Detection
    (2010-01-01) Rinaldi, Matteo; Duick, Brandon; Zuniga, Chiara; Zuo, Chengjie; Piazza, Gianluca
    This paper reports on the design and experimental verification of a new class of nanoscale gravimetric sensors based on ultra-thin-film AlN Contour-Mode Resonant Sensor (CMR-S) functionalized with ss-DNA and connected to a chip-based self-sustaining oscillator loop (fabricated in the ON Semiconductor 0.5 μm CMOS process) for direct frequency read-out. The 220 MHz oscillator based on the ultra-thin AlN CMR-S exhibits an Allan Variance of ∼20 Hz for 100 ms gate time. The sensor affinity for the adsorption of volatile organic chemicals such as 2,6 dinitroluene (DNT, a simulant for explosive vapors) is enhanced by functionalizing the top gold electrode of the device with a thiol-terminated single stranded DNA sequence (Thiol - 5’ CTT CTG TCT TGA TGT TTG TCA AAC 3’) enabling the detection of concentrations as low as 1.5 part per billion (ppb).