ss-DNA Functionalized Ultra-Thin-Film AlN Contour-Mode Resonators with Self-Sustained Oscillator for Volatile Organic Chemical Detection

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Departmental Papers (ESE)
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Electrical and Electronics
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This paper reports on the design and experimental verification of a new class of nanoscale gravimetric sensors based on ultra-thin-film AlN Contour-Mode Resonant Sensor (CMR-S) functionalized with ss-DNA and connected to a chip-based self-sustaining oscillator loop (fabricated in the ON Semiconductor 0.5 μm CMOS process) for direct frequency read-out. The 220 MHz oscillator based on the ultra-thin AlN CMR-S exhibits an Allan Variance of ∼20 Hz for 100 ms gate time. The sensor affinity for the adsorption of volatile organic chemicals such as 2,6 dinitroluene (DNT, a simulant for explosive vapors) is enhanced by functionalizing the top gold electrode of the device with a thiol-terminated single stranded DNA sequence (Thiol - 5’ CTT CTG TCT TGA TGT TTG TCA AAC 3’) enabling the detection of concentrations as low as 1.5 part per billion (ppb).

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2010-01-01
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Departmental Papers (ESE)
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2023-05-17T03:50:37.000
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Suggested Citation: Matteo Rinaldi, Brandon Duick, Chiara Zuniga, Chengjie Zuo, and Gianluca Piazza. "ss-DNA Functionalized Ultra-Thin-Film AlN Contour-Mode Resonators with Self-Sustained Oscillator for Volatile Organic Chemical Detection" 23rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2010) (2010): 132-135. ©2010 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE."
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