Super-High-Frequency Two-Port AlN Contour-Mode Resonators for RF Applications
Penn collection
Degree type
Discipline
Subject
Ultra-Thin-Film AlN
Nanoscaled Contour-Mode Resonators
MEMS Resonators
MEMS Filters
NEMS
Acoustics, Dynamics, and Controls
Electrical and Computer Engineering
Electrical and Electronics
Electro-Mechanical Systems
Electronic Devices and Semiconductor Manufacturing
Nanoscience and Nanotechnology
Nanotechnology Fabrication
Signal Processing
Systems and Communications
Funder
Grant number
License
Copyright date
Distributor
Related resources
Contributor
Abstract
This paper reports on the design and experimental verification of a new class of thin-film (250 nm) superhigh- frequency laterally-vibrating piezoelectric microelectromechanical (MEMS) resonators suitable for the fabrication of narrow-band MEMS filters operating at frequencies above 3 GHz. The device dimensions have been opportunely scaled both in the lateral and vertical dimensions to excite a contourextensional mode of vibration in nanofeatures of an ultra-thin (250 nm) AlN film. In this first demonstration, 2-port resonators vibrating up to 4.5 GHz have been fabricated on the same die and attained electromechanical coupling, kt^2, in excess of 1.5%. These devices are employed to synthesize the highest frequency MEMS filter (3.7 GHz) based on AlN contour-mode resonator technology ever reported.