PMMA A2 and A4 Spin Curves

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PMMA_Spin_Curves_SC.pdf (440.86 KB)
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PMMA
A2
A4
PMMA A2
PMMA A4
Spin Curves
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Spin
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https://repository.upenn.edu/handle/20.500.14332/45852
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This report documents the spin curves for the PMMA A2 and A4 electron beam lithography resists from MicroChem. The aim is to provide a spin curve reference for the A2 and A4 dilutions at the Singh Center for Nanotechnolgy Quattrone Nanofabrication Facility.

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2016-12-16
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