Azadi, Mohsen

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Now showing 1 - 10 of 22
  • Publication
    ZEP520A Contrast Curves
    (2016-12-16) Lopez, Gerald G.; Azadi, Mohsen
    This report documents the contrast curves for the ZEP520A electron beam lithography resist from ZEON Chemicals. Dilution by weight of ZEP520A vs spin speed from 1000 to 6000 rpm was generated in previous work. The aim is to provide an approximate clearing and base dose for the ZEP520A standard process at the Singh Center for Nanotechnology.
  • Publication
    PMMA A2 Contrast Curves
    (2016-12-16) Lopez, Gerald G.; Azadi, Mohsen
    This report documents the contrast curves for the PMMA A2 electron beam lithography resist from MicroChem. Spin curves for PMMA A2 can be found in previous work. The aim is to provide an approximate clearing and base dose for the PMMA A2 standard process at the Singh Center for Nanotechnology.
  • Publication
    CSAR 62 Spin Curve
    (2018-12-21) Azadi, Mohsen; Griggs, Georgia; de Villafranca, Glen; Lopez, Gerald
  • Publication
    CSAR 62 Contrast Curves
    (2017-12-21) Azadi, Mohsen; Griggs, Georgia; de Villafranca, Glen; Lopez, Gerald
  • Publication
    SPTS Si DRIE standard operating procedure
    (2021-12-01) Azadi, Mohsen
  • Publication
  • Publication
    PMMA A2 and A4 Spin Curves
    (2016-12-16) Lopez, Gerald G; Azadi, Mohsen
    This report documents the spin curves for the PMMA A2 and A4 electron beam lithography resists from MicroChem. The aim is to provide a spin curve reference for the A2 and A4 dilutions at the Singh Center for Nanotechnolgy Quattrone Nanofabrication Facility.
  • Publication
  • Publication
    PlasmaPro 100 Cobra ICP standard operating procedure
    (2022-01-01) Azadi, Mohsen
  • Publication
    Spin Curves for MicroChem S1800 (1805, 1813, 1818) Series Positive Resist
    (2016-07-18) Azadi, Mohsen; Lopez, Gerald G
    Spin curves for MicroChem's S1805, S1813, and S1818 were generated and mapped using the Filmetrics F50. Statistical measurements were performed (N=85) and are reported here.