PMMA A2 and A4 Spin Curves
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PMMA
A2
A4
PMMA A2
PMMA A4
Spin Curves
Curve
Spin
Dilution
A2
A4
PMMA A2
PMMA A4
Spin Curves
Curve
Spin
Dilution
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Abstract
This report documents the spin curves for the PMMA A2 and A4 electron beam lithography resists from MicroChem. The aim is to provide a spin curve reference for the A2 and A4 dilutions at the Singh Center for Nanotechnolgy Quattrone Nanofabrication Facility.
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2016-12-16