Date of this Version
Quattrone Nanofabrication Facility
Parylene-C has been deposited on bare Si wafers by physical vapor deposition using the SCS Coating Systems. Results show a 12 µm thick Parylene-C ﬁlm with 10 g of dimer and negligible thickness variation across a wafer. We ﬁnd a positive linear relationship between ﬁlm thickness and mass of dimer at a range of 1 g to 18 g. However, the Al boat for dimer was burnt with 18 g of dimer, suggesting multiple depositions with 1 g to 10 g of dimer are recommended to achieve the Parylene-C ﬁlm thicker than 12 µm.
Parylene-C, thinkness, uniformity, SCS Parylene Coater
Date Posted: 17 January 2019
This document has been peer reviewed.