Tool Data

Document Type

Technical Report

Date of this Version

7-18-2016

Facility

Quattrone Nanofabrication Facility

Abstract

Spin curves for MicroChem's S1805, S1813, and S1818 were generated and mapped using the Filmetrics F50. Statistical measurements were performed (N=85) and are reported here.

Keywords

S1805, S1813, S1818, S1805, 1813, 1818, MicroChem, spin curves, Shipley, spin curve, resist, positive resist, resist thickness, spin speed

Previous Versions

Apr 21 2015

Additional Files

S1800 Series Spin Data.zip (4519 kB)
Filmetrics F50 Screen Captures

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Date Posted: 21 April 2015

 

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