Tool Data
Document Type
Technical Report
Date of this Version
7-18-2016
Facility
Quattrone Nanofabrication Facility
Abstract
Spin curves for MicroChem's S1805, S1813, and S1818 were generated and mapped using the Filmetrics F50. Statistical measurements were performed (N=85) and are reported here.
Keywords
S1805, S1813, S1818, S1805, 1813, 1818, MicroChem, spin curves, Shipley, spin curve, resist, positive resist, resist thickness, spin speed
Previous Versions
Included in
Electrical and Electronics Commons, Electronic Devices and Semiconductor Manufacturing Commons, Nanotechnology Fabrication Commons
Date Posted: 21 April 2015