Date of this Version
Quattrone Nanofabrication Facility
Spin curves for MicroChem's S1805, S1813, and S1818 were generated and mapped using the Filmetrics F50. Statistical measurements were performed (N=85) and are reported here.
S1805, S1813, S1818, S1805, 1813, 1818, MicroChem, spin curves, Shipley, spin curve, resist, positive resist, resist thickness, spin speed
Additional FilesS1800 Series Spin Data.zip (4519 kB)
Filmetrics F50 Screen Captures
Electrical and Electronics Commons, Electronic Devices and Semiconductor Manufacturing Commons, Nanotechnology Fabrication Commons
Date Posted: 21 April 2015