Standard Operating Procedures
Document Type
Technical Report
Files
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Date of this Version
10-25-2022
Facility
Quattrone Nanofabrication Facility
Summary/Description
Standard Operating Procedure for the Explorer 14 Magnetron Sputterer (PVD-05) located at the Quattrone Nanofabrication Facility within the Singh Center for Nanotechnology at the University of Pennsylvania
Keywords
sputtering, physical vapor deposition
Recommended Citation
Azadi, Mohsen and Röhr, Jason Alexander, "Explorer 14 Magnetron Sputterer (PVD-05) Standard Operating Procedure" (2022). Standard Operating Procedures. Book 24.
https://repository.upenn.edu/scn_sop/24
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Condensed Matter Physics Commons, Materials Science and Engineering Commons, Nanoscience and Nanotechnology Commons