Explorer 14 Magnetron Sputterer (PVD-05) Standard Operating Procedure

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dc.contributor.authorAzadi, Mohsen
dc.contributor.authorRöhr, Jason Alexander
dc.coverage.locationQuattrone Nanofabrication Facility
dc.date2023-05-18T03:57:12.000
dc.date.accessioned2023-05-23T01:20:02Z
dc.date.available2022-10-25T00:00:00Z
dc.date.issued2022-10-25
dc.date.submitted2022-10-25T13:08:02-07:00
dc.description.abstractStandard Operating Procedure for the Explorer 14 Magnetron Sputterer (PVD-05) located at the Quattrone Nanofabrication Facility within the Singh Center for Nanotechnology at the University of Pennsylvania
dc.identifier.urihttps://repository.upenn.edu/handle/20.500.14332/45914
dc.legacy.articleid1025
dc.legacy.fieldsuse_pdf
dc.legacy.fulltexturlhttps://repository.upenn.edu/cgi/viewcontent.cgi?article=1025&context=scn_sop&unstamped=1
dc.source.issue24
dc.source.journalStandard Operating Procedures
dc.source.statuspublished
dc.subject.othersputtering
dc.subject.otherphysical vapor deposition
dc.subject.otherCondensed Matter Physics
dc.subject.otherMaterials Science and Engineering
dc.subject.otherNanoscience and Nanotechnology
dc.titleExplorer 14 Magnetron Sputterer (PVD-05) Standard Operating Procedure
dc.typeReport
digcom.contributor.authorisAuthorOfPublication|email:azadi@seas.upenn.edu|institution:University of Pennsylvania|Azadi, Mohsen
digcom.contributor.authorisAuthorOfPublication|email:jarohr@seas.upenn.edu|institution:University of Pennsylvania|Röhr, Jason Alexander
digcom.date.embargo2022-10-25T00:00:00-07:00
digcom.identifierscn_sop/24
digcom.identifier.contextkey31938857
digcom.identifier.submissionpathscn_sop/24
digcom.typereport
dspace.entity.typePublication
relation.isAuthorOfPublication958f1844-c7c0-4be4-9498-1056e33b3fd8
relation.isAuthorOfPublication5c7a3db7-ba0b-4e9f-8d60-005af1a773c7
relation.isAuthorOfPublication.latestForDiscovery958f1844-c7c0-4be4-9498-1056e33b3fd8
upenn.schoolDepartmentCenterStandard Operating Procedures
upenn.schoolDepartmentCenterQuattrone Nanofabrication Facility
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