Document Type

Technical Report

Date of this Version

4-27-2016

Facility

Quattrone Nanofabrication Facility

Abstract

The SOP for MicroChem SPR-220 7.0 at the Quattrone Nanofabrcation Facility is provided along with thickness vs. dose-to-clear and contrast curve data. The document is intended to provide a starting point when using MicroChem SPR-220 7.0.

Keywords

SPR220, MicroChem, SUSS, MA6, SPR-220

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Date Posted: 27 April 2016

 

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