Title
SUSS MicroTec MA6 Gen3 – MicroChem SPR-220 7.0 Thickness vs. Dose-to-Clear and Contrast Curve Data
Document Type
Technical Report
Date of this Version
4-27-2016
Facility
Quattrone Nanofabrication Facility
Abstract
The SOP for MicroChem SPR-220 7.0 at the Quattrone Nanofabrcation Facility is provided along with thickness vs. dose-to-clear and contrast curve data. The document is intended to provide a starting point when using MicroChem SPR-220 7.0.
Keywords
SPR220, MicroChem, SUSS, MA6, SPR-220
Date Posted: 27 April 2016