Multi-Frequency Pierce Oscillators Based On Piezoelectric AlN Contour-Mode MEMS Resonators

Loading...
Thumbnail Image
Penn collection
Departmental Papers (ESE)
Degree type
Discipline
Subject
pierce oscillator
multi-frequency oscillator
AlN contour-mode resonator
microelectromechanical systems (MEMS)
piezoelectric resonator
Electrical and Electronics
Funder
Grant number
License
Copyright date
Distributor
Related resources
Contributor
Abstract

This paper reports on the first demonstration of multi-frequency (176, 222, 307, and 482 MHz) oscillators based on piezoelectric AlN contour-mode MEMS resonators. All the oscillators show phase noise values between –88 and –68 dBc/Hz at 1 kHz offset and phase noise floors as low as –160 dBc/Hz at 1 MHz offset. The same Pierce circuit design is employed to sustain oscillations at the 4 different frequencies, while the oscillator core consumes at most 10 mW. The AlN resonators are currently wirebonded to the integrated circuit realized in the AMIS 0.5 μm 5 V CMOS process. This work constitutes a substantial step forward towards the demonstration of a single-chip multi-frequency reconfigurable timing solution that could be used in wireless communications and sensing applications.

Advisor
Date Range for Data Collection (Start Date)
Date Range for Data Collection (End Date)
Digital Object Identifier
Series name and number
Publication date
2008-09-01
Journal title
Volume number
Issue number
Publisher
Publisher DOI
Journal Issue
Comments
Copyright 2008 IEEE. Reprinted from 2008 IEEE International Frequency Control Symposium, May 2008, pages 402-407. This material is posted here with permission of the IEEE. Such permission of the IEEE does not in any way imply IEEE endorsement of any of the University of Pennsylvania's products or services. Internal or personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution must be obtained from the IEEE by writing to pubs-permissions@ieee.org. By choosing to view this document, you agree to all provisions of the copyright laws protecting it.
Recommended citation
Collection