High Frequency Piezoelectric Resonant Nanochannel for Bio-Sensing Applications in Liquid Environment

Loading...
Thumbnail Image
Penn collection
Departmental Papers (ESE)
Degree type
Discipline
Subject
Electrical and Computer Engineering
Engineering
Funder
Grant number
License
Copyright date
Distributor
Related resources
Contributor
Abstract

This paper reports on the first demonstration of a 457 MHz AlN Piezolectric Resonant Nanochannel (PRN) for biosensing applications in liquid environment. A novel process consisting of 7 lithographic steps was developed to fabricate the PRN. The new resonant device shows an unchanged value of the electromechanical coupling, kt 2 (about 0.8 %), whether the channel is filled with air or water and a quality factor, Q, in liquid of approximately 170. The value of kt 2 and Q are respectively about 2.7 and 2 times the ones recorded for conventional laterally vibrating AlN Contour Mode Resonant Sensors (CMR-Ss) submerged in water. Overall, these results translate in a ~ 5 fold enhancement in the figure of merit (kt 2 - Q product) of the resonant device when operated in liquid and simultaneously permit the efficient delivery of ultra-low concentrations of fluid samples directly on the surface of the sensor.

Advisor
Date of presentation
2010-11-01
Conference name
Departmental Papers (ESE)
Conference dates
2023-05-17T05:55:40.000
Conference location
Date Range for Data Collection (Start Date)
Date Range for Data Collection (End Date)
Digital Object Identifier
Series name and number
Volume number
Issue number
Publisher
Publisher DOI
Journal Issue
Comments
Suggested Citation: Zuniga, Chiara; Rinaldi, Matteo; Piazza, Gianluca; , "High frequency Piezoelectric Resonant Nanochannel for bio-sensing applications in liquid environment," Sensors, 2010 IEEE , vol., no., pp.52-55, 1-4 Nov. 2010 ©2010 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
Recommended citation
Collection