Departmental Papers (ESE)

Abstract

This paper reports on the analytical modeling and experimental verification of the mechanically-limited power handling and nonlinearity in piezoelectric aluminum nitride (AlN) contour-mode resonators (CMR) having different electrode configurations (thickness field excitation, lateral field excitation, one-port and two-port configurations) and operating at different frequencies (177-3047 MHz). Despite its simplicity, the one-dimensional analytical model fits the experimental behavior of AlN CMRs in terms of power handling capabilities. The model and experiment also confirm the advantage of scaling (i.e. miniaturizing) the AlN CMRs to higher frequencies at which higher critical power density can be more easily attained up to values in excess of 10 μW/μm3.

Document Type

Conference Paper

Date of this Version

9-1-2009

Publication Source

2009 IEEE International Ultrasonics Symposium (IUS 2009)

Start Page

1187

Last Page

1190

Comments

Suggested Citation:
Chengjie Zuo, Matteo Rinaldi, and Gianluca Piazza. "Power Handling and Related Frequency Scaling Advantages in Piezoelectric AlN Contour-Mode MEMS Resonators" 2009 IEEE International Ultrasonics Symposium (IUS 2009) (2009): 1187-1190.

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Date Posted: 13 July 2010