Explorer 14 Magnetron Sputterer (PVD-05) Standard Operating Procedure
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Standard Operating Procedures
Quattrone Nanofabrication Facility
Quattrone Nanofabrication Facility
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sputtering
physical vapor deposition
Condensed Matter Physics
Materials Science and Engineering
Nanoscience and Nanotechnology
physical vapor deposition
Condensed Matter Physics
Materials Science and Engineering
Nanoscience and Nanotechnology
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Abstract
Standard Operating Procedure for the Explorer 14 Magnetron Sputterer (PVD-05) located at the Quattrone Nanofabrication Facility within the Singh Center for Nanotechnology at the University of Pennsylvania
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2022-10-25