Characterization and Optimization of Parylene-C deposition process using SCS Parylene coater
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Quattrone Nanofabrication Facility
Quattrone Nanofabrication Facility
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Parylene-C
thinkness
uniformity
SCS Parylene Coater
Biotechnology
Nanoscience and Nanotechnology
Polymer and Organic Materials
Semiconductor and Optical Materials
thinkness
uniformity
SCS Parylene Coater
Biotechnology
Nanoscience and Nanotechnology
Polymer and Organic Materials
Semiconductor and Optical Materials
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Abstract
Parylene-C has been deposited on bare Si wafers by physical vapor deposition using the SCS Coating Systems. Results show a 12 µm thick Parylene-C film with 10 g of dimer and negligible thickness variation across a wafer. We find a positive linear relationship between film thickness and mass of dimer at a range of 1 g to 18 g. However, the Al boat for dimer was burnt with 18 g of dimer, suggesting multiple depositions with 1 g to 10 g of dimer are recommended to achieve the Parylene-C film thicker than 12 µm.
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2019-01-15