MicroChem S1800 Series Resist Application onto Si
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Protocols and Reports
Quattrone Nanofabrication Facility
Quattrone Nanofabrication Facility
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S1800
positive resist
SURPASS
positive resist
SURPASS
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Abstract
The Quattrone Nanofabrication Facility standard operating procedure for the application of MicroChem S1800 series resist onto an Si wafer is provided in this document.
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2016-02-18