SUSS MicroTec MA6 Gen3 – MicroChem SPR-220 7.0 Thickness vs. Dose-to-Clear and Contrast Curve Data
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SPR220
MicroChem
SUSS
MA6
SPR-220
Nanoscience and Nanotechnology
MicroChem
SUSS
MA6
SPR-220
Nanoscience and Nanotechnology
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Abstract
The SOP for MicroChem SPR-220 7.0 at the Quattrone Nanofabrcation Facility is provided along with thickness vs. dose-to-clear and contrast curve data. The document is intended to provide a starting point when using MicroChem SPR-220 7.0.
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2016-04-27