How to Make Chips with Nanofabrication | University of Pennsylvania
Date of this Version
Quattrone Nanofabrication Facility
The Singh Center for Nanotechnology and LRSM at the University of Pennsylvania demonstrate the nanofabrication process to make chips using lithography, deposition and etch. Fabricated chips were characterized with reflectometry and opticalmicroscopy.
For more information:
Nanofabrication, Nanotechnology, Lithography, Etch, Deposition, Optical Microscopy, Reflectometry
Hoang, Lauren; Idris, Abbas; Farnan, Dale; Macera, Felice; Wallace, Ashely; Jones, David; and Kim, Gyuseok, "How to Make Chips with Nanofabrication | University of Pennsylvania", Videos. Paper 28.