Macera, Felice

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  • Publication
    How to Make Chips with Nanofabrication | University of Pennsylvania
    (2020-11-10) Hoang, Lauren; Idris, Abbas; Farnan, Dale; Macera, Felice; Wallace, Ashely; Jones, David; Kim, Gyuseok
    The Singh Center for Nanotechnology and LRSM at the University of Pennsylvania demonstrate the nanofabrication process to make chips using lithography, deposition and etch. Fabricated chips were characterized with reflectometry and opticalmicroscopy. For more information: https://www.nano.upenn.edu/ https://www.nnci.net/