Tool Data
Document Type
Technical Report
Date of this Version
3-10-2017
Facility
Quattrone Nanofabrication Facility
Date Posted: 20 February 2017
Technical Report
3-10-2017
Quattrone Nanofabrication Facility
Date Posted: 20 February 2017
Comments
The purpose of this document is to show characterization data for the sputtering of Copper using the Denton Vacuum Explorer-14 System.