Tool Data
Document Type
Technical Report
Date of this Version
5-7-2016
Facility
Quattrone Nanofabrication Facility
Abstract
This report discusses the CHF3/O2 etch process of SiNx using the Oxford 80 Plus RIE.
Date Posted: 07 May 2016
Technical Report
5-7-2016
Quattrone Nanofabrication Facility
This report discusses the CHF3/O2 etch process of SiNx using the Oxford 80 Plus RIE.
Date Posted: 07 May 2016