ScholarlyCommons

Title

Anatech SCE-108 Barrel Asher standard operating procedure

Author(s)

Mohsen Azadi, Singh Center for NanotechnologyFollow

Document Type

Working Paper

Files

Date of this Version

8-2022

Keywords

barrel Asher SOP, anatech SCE-108, oxygen plasma, resist removal, DE02 SOP

Recommended Citation

Azadi, Mohsen, "Anatech SCE-108 Barrel Asher standard operating procedure" (2022). Standard Operating Procedures. Book 9.
https://repository.upenn.edu/scn_sop/9