Standard Operating Procedures

Document Type

Working Paper

Files

Download

Download Full Text (676 KB)

Date of this Version

11-2021

Facility

Quattrone Nanofabrication Facility

Keywords

RIE SOP, Oxford 80Plus RIE SOP, Reactive Ion Etching SOP

Oxford PlasmaLab 80 Plus RIE standard operating procedure

Share

COinS
 
 

To view the content in your browser, please download Adobe Reader or, alternately,
you may Download the file to your hard drive.

NOTE: The latest versions of Adobe Reader do not support viewing PDF files within Firefox on Mac OS and if you are using a modern (Intel) Mac, there is no official plugin for viewing PDF files within the browser window.