ScholarlyCommons

Title

Oxford PlasmaLab 80 Plus RIE standard operating procedure

Author(s)

Mohsen Azadi, Singh Center for NanotechnologyFollow

Document Type

Working Paper

Files

Date of this Version

11-2021

Facility

Quattrone Nanofabrication Facility

Keywords

RIE SOP, Oxford 80Plus RIE SOP, Reactive Ion Etching SOP

Recommended Citation

Azadi, Mohsen, "Oxford PlasmaLab 80 Plus RIE standard operating procedure" (2021). Standard Operating Procedures. Book 7.
https://repository.upenn.edu/scn_sop/7