Standard Operating Procedures
Document Type
Working Paper
Files
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Date of this Version
3-2022
Keywords
Sandvik LPCVD, Dry/wet oxide growth, LPCVD SiNx, LPCVD SOP
Recommended Citation
Azadi, Mohsen, "Sandvik LPCVD and anneal tubes standard operating procedure" (2022). Standard Operating Procedures. Book 20.
https://repository.upenn.edu/scn_sop/20