XeF2 SPTS Xactix Isotropic Etcher standard operating procedure
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Penn collection
Standard Operating Procedures
Degree type
Discipline
Subject
XeF2 etch
XeF2 SOP
SPTS Xactix SOP
Isotropic Si removal
Si removal via dry etch
XeF2 SOP
SPTS Xactix SOP
Isotropic Si removal
Si removal via dry etch
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Publication date
2021-12-01