ScholarlyCommons

Title

SPTS Si DRIE standard operating procedure

Author(s)

Mohsen Azadi, Singh Center for NanotechnologyFollow

Document Type

Working Paper

Files

Date of this Version

12-2021

Facility

Quattrone Nanofabrication Facility

Keywords

DRIE, SPTS DRIE SOP, Deep Reactive Ion Etch, Si Deep Etching

Recommended Citation

Azadi, Mohsen, "SPTS Si DRIE standard operating procedure" (2021). Standard Operating Procedures. Book 11.
https://repository.upenn.edu/scn_sop/11