
Standard Operating Procedures
Document Type
Working Paper
Files
Download
Download Full Text (1.4 MB)
Date of this Version
12-2021
Facility
Quattrone Nanofabrication Facility
Keywords
DRIE, SPTS DRIE SOP, Deep Reactive Ion Etch, Si Deep Etching
Recommended Citation
Azadi, Mohsen, "SPTS Si DRIE standard operating procedure" (2021). Standard Operating Procedures. Book 11.
https://repository.upenn.edu/scn_sop/11
