Departmental Papers (ESE)

Abstract

In this paper, we present the first demonstration of the monolithic integration of Aluminum Nitride (AlN) micromechanical contour mode technology filters with dual-beam actuated MEMS AlN switches. This integration has lead to the development of the first prototype of a fully-integrated all-mechanical switchable filter. Integration has been demonstrated by using AlN contour-mode MEMS filters at two center frequencies, i.e. 98.7 and 279.9 MHz. The micromechanical switch design used here is a novel three-finger dual-beam topology that improves the isolation and insertion loss of the switch by decreasing the parasitic coupling between the DC and RF signals over a previous AlN MEMS dual-beam design. With the use of just one switch fabricated right next to, and integrated with the filter, the AlN MEMS filter is effectively turned off and its pass-band transmission is lowered to the out of band level at 279.9 MHz.

Document Type

Conference Paper

Date of this Version

4-1-2009

Publication Source

2009 Joint Meeting of the European Frequency and Time Forum and the IEEE International Frequency Control Symposium (EFTF-IFCS 2009)

Start Page

1

Last Page

4

Comments

Suggested Citation:
Nipun Sinha, Rashed Mahameed, Chengjie Zuo, and Gianluca Piazza. "Integration of AlN Micromechanical Contour-Mode Technology Filters with Three-Finger Dual Beam AlN MEMS Switches" 2009 Joint Meeting of the European Frequency and Time Forum and the IEEE International Frequency Control Symposium (EFTF-IFCS 2009) (2009): 1-4.

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Date Posted: 13 July 2010