Integration of AlN Micromechanical Contour-Mode Technology Filters with Three-Finger Dual Beam AlN MEMS Switches

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In this paper, we present the first demonstration of the monolithic integration of Aluminum Nitride (AlN) micromechanical contour mode technology filters with dual-beam actuated MEMS AlN switches. This integration has lead to the development of the first prototype of a fully-integrated all-mechanical switchable filter. Integration has been demonstrated by using AlN contour-mode MEMS filters at two center frequencies, i.e. 98.7 and 279.9 MHz. The micromechanical switch design used here is a novel three-finger dual-beam topology that improves the isolation and insertion loss of the switch by decreasing the parasitic coupling between the DC and RF signals over a previous AlN MEMS dual-beam design. With the use of just one switch fabricated right next to, and integrated with the filter, the AlN MEMS filter is effectively turned off and its pass-band transmission is lowered to the out of band level at 279.9 MHz.

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Suggested Citation: Nipun Sinha, Rashed Mahameed, Chengjie Zuo, and Gianluca Piazza. "Integration of AlN Micromechanical Contour-Mode Technology Filters with Three-Finger Dual Beam AlN MEMS Switches" 2009 Joint Meeting of the European Frequency and Time Forum and the IEEE International Frequency Control Symposium (EFTF-IFCS 2009) (2009): 1-4. ©20xx IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
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