Lesker PVD75 E-beam/Thermal Evaporator (PVD-02) Standard Operating Procedure
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Standard Operating Procedures
Quattrone Nanofabrication Facility
Quattrone Nanofabrication Facility
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physical vapor deposition
e-beam evaporation
thermal evaporation
Condensed Matter Physics
Electronic Devices and Semiconductor Manufacturing
Engineering Science and Materials
Nanotechnology Fabrication
e-beam evaporation
thermal evaporation
Condensed Matter Physics
Electronic Devices and Semiconductor Manufacturing
Engineering Science and Materials
Nanotechnology Fabrication
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Abstract
Standard Operating Procedure for the Lesker PVD75 E-beam/Thermal Evaporator (PVD-02) located at the Quattrone Nanofabrication Facility within the Singh Center for Nanotechnology at the University of Pennsylvania
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2023-01-04