Lesker PVD75 E-beam/Thermal Evaporator (PVD-02) Standard Operating Procedure

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dc.contributor.authorBarth, David S
dc.contributor.authorRöhr, Jason A.
dc.contributor.authorBarth, David S
dc.contributor.authorRöhr, Jason A.
dc.coverage.locationQuattrone Nanofabrication Facility
dc.date2023-05-18T04:45:33.000
dc.date.accessioned2023-05-23T01:20:03Z
dc.date.available2023-01-04T00:00:00Z
dc.date.issued2023-01-04
dc.date.submitted2023-01-04T07:13:08-08:00
dc.description.abstractStandard Operating Procedure for the Lesker PVD75 E-beam/Thermal Evaporator (PVD-02) located at the Quattrone Nanofabrication Facility within the Singh Center for Nanotechnology at the University of Pennsylvania
dc.identifier.urihttps://repository.upenn.edu/handle/20.500.14332/45915
dc.legacy.articleid1027
dc.legacy.fieldsuse_pdf
dc.legacy.fulltexturlhttps://repository.upenn.edu/cgi/viewcontent.cgi?article=1027&context=scn_sop&unstamped=1
dc.rights.urihttp://creativecommons.org/licenses/by/3.0/
dc.source.issue25
dc.source.journalStandard Operating Procedures
dc.source.statuspublished
dc.subject.otherphysical vapor deposition
dc.subject.othere-beam evaporation
dc.subject.otherthermal evaporation
dc.subject.otherCondensed Matter Physics
dc.subject.otherElectronic Devices and Semiconductor Manufacturing
dc.subject.otherEngineering Science and Materials
dc.subject.otherNanotechnology Fabrication
dc.titleLesker PVD75 E-beam/Thermal Evaporator (PVD-02) Standard Operating Procedure
dc.typeWorking Paper
digcom.contributor.authorisAuthorOfPublication|email:dsbarth@seas.upenn.edu|institution:University of Pennsylvania|Barth, David S
digcom.contributor.authorisAuthorOfPublication|email:jarohr@seas.upenn.edu|institution:University of Pennsylvania|Röhr, Jason A.
digcom.date.embargo2023-01-04T00:00:00-08:00
digcom.identifierscn_sop/25
digcom.identifier.contextkey32989204
digcom.identifier.submissionpathscn_sop/25
digcom.typeworkingpaper
dspace.entity.typePublication
relation.isAuthorOfPublication8f7bd463-6c96-40c8-842d-8098a1c1197a
relation.isAuthorOfPublication5c7a3db7-ba0b-4e9f-8d60-005af1a773c7
relation.isAuthorOfPublication.latestForDiscovery8f7bd463-6c96-40c8-842d-8098a1c1197a
upenn.schoolDepartmentCenterStandard Operating Procedures
upenn.schoolDepartmentCenterQuattrone Nanofabrication Facility
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