Tool Data
Document Type
Technical Report
Date of this Version
4-29-2015
Facility
Quattrone Nanofabrication Facility
Creative Commons License
This work is licensed under a Creative Commons Attribution-Share Alike 4.0 International License.
Keywords
Growth Rates, Pinholes, ALD, SiO2, Al2O3, TiO2, HfO2
Date Posted: 29 April 2015