Tool Data
Document Type
Technical Report
Date of this Version
4-28-2015
Facility
Quattrone Nanofabrication Facility
Creative Commons License
This work is licensed under a Creative Commons Attribution-Share Alike 4.0 International License.
Keywords
Thicknesses, Pinholes, SiO2, SiNx, a-Si, PECVD
Date Posted: 28 April 2015