Thicknesses and Pinholes of SiO2, SiNx, and a-Si Films prepared by PECVD, No 2
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Penn collection
Tool Data
Quattrone Nanofabrication Facility
Quattrone Nanofabrication Facility
Degree type
Discipline
Subject
Thicknesses
Pinholes
SiO2
SiNx
a-Si
PECVD
Pinholes
SiO2
SiNx
a-Si
PECVD
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Abstract
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Publication date
2015-04-28