"Thicknesses and Pinholes of SiO2, SiNx, and a-Si Films prepared by PEC" by Dhruv Turakhia

Skip to main content

Tool Data

Title

Thicknesses and Pinholes of SiO2, SiNx, and a-Si Films prepared by PECVD, No 2

Author(s)

Dhruv TurakhiaFollow

Document Type

Technical Report

Date of this Version

4-28-2015

Facility

Quattrone Nanofabrication Facility

Creative Commons License

This work is licensed under a Creative Commons Attribution-Share Alike 4.0 License.

Keywords

Thicknesses, Pinholes, SiO2, SiNx, a-Si, PECVD

COinS

Date Posted: 28 April 2015