Film Stress of Ti film prepared by PVD75 e-beam evaporator

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Film_Stress_of_Ti_film_prepared_by_PVD75_e_beam_evaporator.pdf (20.77 KB)
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Quattrone Nanofabrication Facility
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Film Stress
Ti film
PVD75 e-beam evaporator
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http://creativecommons.org/licenses/by-sa/4.0/
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https://repository.upenn.edu/handle/20.500.14332/45929
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2015-04-27
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