Standard Operating Procedures
Document Type
Technical Report
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Date of this Version
4-2023
Facility
Quattrone Nanofabrication Facility
Summary/Description
Standard Operating Procedure for the Filmetrics Profilm3D Optical Profilometer/White Light Interferometer
Creative Commons License
This work is licensed under a Creative Commons Attribution 3.0 License.
Keywords
metrology, optical profilometer, 3D imaging, nanotechnology, WLI, PSI
Recommended Citation
Barth, David S., "Filmetrics Profilm3D (MET-05) Standard Operating Procedure" (2023). Standard Operating Procedures. Book 27.
https://repository.upenn.edu/scn_sop/27
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Electronic Devices and Semiconductor Manufacturing Commons, Nanotechnology Fabrication Commons