Standard Operating Procedures
Document Type
Other
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Date of this Version
12-22-2021
Facility
Quattrone Nanofabrication Facility
Summary/Description
The IPG IX-255 Excimer Laser is a highly flexible UV laser micromachining system for multi-purpose, R&D and production applications. The system combines a Class 1 workstation integrated with a proprietary UV (193nm) laser and beam shape selector (infinitely variable rectangular and discrete circular) to machine transparent samples such as plastic, glass, and PDMS.
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This work is licensed under a Creative Commons Attribution-Share Alike 4.0 International License.
Keywords
excimer laser micromachining
Recommended Citation
Johnston, Eric, "IPG IX-255 Excimer Laser Micromachining Standard Operating Procedure" (2021). Standard Operating Procedures. Book 18.
https://repository.upenn.edu/scn_sop/18