ABM Mask Aligner standard operating procedure

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ABM___MA_03_SOP.pdf (974.86 KB)
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Standard Operating Procedures
Quattrone Nanofabrication Facility
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ABM mask aligner lithography
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http://creativecommons.org/licenses/by-sa/4.0/
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https://repository.upenn.edu/handle/20.500.14332/45900
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The ABM mask aligner is a manual top-side mask aligner that can accommodate up to 100mm substrates. It can also be used for aligning PDMS components for PDMS-to-PDMS bonding.

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2021-11-15
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