Departmental Papers (ESE)


This paper reports on the design, fabrication and testing of novel one and two port piezoelectric higher order contour-mode MEMS resonators that can be employed in RF wireless communications as frequency reference elements or arranged in arrays to form banks of multi-frequency filters. The paper offers a comparison of one and two port resonant devices exhibiting frequencies approximately ranging from 200 to 800 MHz, quality factor of few thousands (1000–2500) and motional resistances ranging from 25 to 1000 Ω. Fundamental advantages and limitations of each solution are discussed. The reported experimental results focus on the response of a higher order one port resonator under different environmental conditions and a new class of two port contour resonators for narrow band filtering applications. Furthermore, an overview of novel frequency synthesis schemes that can be enabled by these contour-mode resonators is briefly presented.

Document Type

Journal Article

Date of this Version

December 2007


Postprint version. Published in Solid State Electronics, Volume 51, Issues 11-12, December 2007, pages 1596-1608.
Special Issue: Papers Selected from the 36th European Solid-State Device Research Conference - ESSDERC’06.
Publisher URL:


RF MEMS, piezoelectric resonator, contour-mode resonators, aluminum nitride



Date Posted: 14 February 2008

This document has been peer reviewed.