Departmental Papers (ESE)


This paper reports theoretical analysis and experimental results on a new class of rectangular plate and ring-shaped contour-mode piezoelectric aluminum nitride radio-frequency microelectromechanical systems resonators that span a frequency range from 19 to 656 MHz showing high-quality factors in air (Qmax = 4300 at 229.9 MHz), low motional resistance (ranging from 50 to 700 Ω), and center frequencies that are lithographically defined. These resonators achieve the lowest value of motional resistance ever reported for contour-mode resonators and combine it with high Q factors, therefore enabling the fabrication of arrays of high-performance microresonators with different frequencies on a single chip. Uncompensated temperature coefficients of frequency of approximately 25 ppm/°C were also recorded for these resonators. Initial discussions on mass loading mechanisms induced by metal electrodes and energy loss phenomenon are provided.

Document Type

Journal Article

Date of this Version

December 2006


Copyright 2006 IEEE. Reprinted from Journal of Microelectrochemical Systems, Volume 15, Issue 6, December 2006, pages 1406-1418.

This material is posted here with permission of the IEEE. Such permission of the IEEE does not in any way imply IEEE endorsement of any of the University of Pennsylvania's products or services. Internal or personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution must be obtained from the IEEE by writing to By choosing to view this document, you agree to all provisions of the copyright laws protecting it.


Aluminum nitride, contour-mode resonators, microelectromechanical systems (MEMS) resonators, piezoelectric resonators, radio-frequency (RF) MEMS



Date Posted: 14 March 2007

This document has been peer reviewed.