Film stress of Ti films prepared by Explorer14 Magnetron Sputterer

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Film_stress_of_Ti_films_prepared_by_Explorer14_Magnetron_Sputterer.pdf (186.12 KB)
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Quattrone Nanofabrication Facility
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Film stress
Ti
Explorer14
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http://creativecommons.org/licenses/by-sa/4.0/
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https://repository.upenn.edu/handle/20.500.14332/45927
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2015-04-27
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