Growth rates and Pinholes of ALD SiO2, Al2O3, TiO2, and HfO2 films
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Penn collection
Tool Data
Quattrone Nanofabrication Facility
Quattrone Nanofabrication Facility
Degree type
Discipline
Subject
Growth Rates
Pinholes
ALD
SiO2
Al2O3
TiO2
HfO2
Pinholes
ALD
SiO2
Al2O3
TiO2
HfO2
Funder
Grant number
Copyright date
Distributor
Related resources
Author
Contributor
Abstract
Advisor
Date Range for Data Collection (Start Date)
Date Range for Data Collection (End Date)
Digital Object Identifier
Series name and number
Publication date
2015-04-29