Real-Time TEM Imaging of the Formation of Crystalline Nanoscale Gaps

Loading...
Thumbnail Image
Penn collection
Departmental Papers (MSE)
Degree type
Discipline
Subject
molecular electronic devices
electronic structure of nanoscale materials
electrical properties of metal-to-metal contacts
nanoscale contacts (electronic transpor
Funder
Grant number
License
Copyright date
Distributor
Related resources
Author
Johnston, Danvers E
Guitton, Beth S
Datta, Sujit S
Contributor
Abstract

We present real-time transmission electron microscopy of nanogap formation by feedback controlled electromigration that reveals a remarkable degree of crystalline order. Crystal facets appear during feedback controlled electromigration indicating a layer-by-layer, highly reproducible electromigration process avoiding thermal runaway and melting. These measurements provide insight into the electromigration induced failure mechanism in sub-20 nm size interconnects, indicating that the current density at failure increases as the width decreases to approximately 1 nm.

Advisor
Date Range for Data Collection (Start Date)
Date Range for Data Collection (End Date)
Digital Object Identifier
Series name and number
Publication date
2008-02-08
Journal title
Volume number
Issue number
Publisher
Publisher DOI
Journal Issue
Comments
Copyright American Physical Society. Reprinted from Physical Review Letters, Volume 100, Issue 3, Article 056805, February 2008, 4 pages. Publisher URL: http://dx.doi.org/10.1103/PhysRevLett.100.056805
Recommended citation
Collection