Thickness and Permeability (against XeF2) of Parylene C film using Parylene Coater

Simple item page
dc.contributor.authorNie, Zisong
dc.coverage.locationQuattrone Nanofabrication Facility
dc.date2023-05-17T11:33:23.000
dc.date.accessioned2023-05-23T01:20:12Z
dc.date.available2023-05-23T01:20:12Z
dc.date.issued2015-04-27
dc.date.submitted2015-04-27T15:21:49-07:00
dc.identifier.urihttps://repository.upenn.edu/handle/20.500.14332/45931
dc.legacy.articleid1015
dc.legacy.fulltexturlhttps://repository.upenn.edu/cgi/viewcontent.cgi?article=1015&context=scn_tooldata&unstamped=1
dc.rights.urihttp://creativecommons.org/licenses/by-sa/4.0/
dc.source.issue16
dc.source.journalTool Data
dc.source.statuspublished
dc.subject.otherThickness
dc.subject.otherPermeability
dc.subject.otherParylene C
dc.titleThickness and Permeability (against XeF2) of Parylene C film using Parylene Coater
dc.typeReport
digcom.contributor.authorNie, Zisong
digcom.identifierscn_tooldata/16
digcom.identifier.contextkey7038080
digcom.identifier.submissionpathscn_tooldata/16
digcom.typereport
dspace.entity.typePublication
upenn.schoolDepartmentCenterTool Data
upenn.schoolDepartmentCenterQuattrone Nanofabrication Facility
Files
Original bundle
Now showing 1 - 1 of 1
Thumbnail Image
Name:
Thickness_and_Permeability_of_Parylene_C_Film.pdf
Size:
104.16 KB
Format:
Adobe Portable Document Format
Download
Collection
Reports