Deposition Rate, Surface Roughness, Morphology, and Film Stress of Al films prepared by Explorer14 Magnetron Sputterer
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Penn collection
Tool Data
Quattrone Nanofabrication Facility
Quattrone Nanofabrication Facility
Degree type
Discipline
Subject
Deposition Rate
Surface Roughness
Morphology
Film Stress
Al
Explorer14
Surface Roughness
Morphology
Film Stress
Al
Explorer14
Funder
Grant number
Copyright date
Distributor
Related resources
Author
Contributor
Abstract
Advisor
Date Range for Data Collection (Start Date)
Date Range for Data Collection (End Date)
Digital Object Identifier
Series name and number
Publication date
2015-04-27