Angle-Resolved Environmental X-Ray Photoelectron Spectroscopy: A New Laboratory Setup for Photoemission Studies at Pressures up to 0.4 Torr

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Mangolini, F.
Åhlund, J.
Egberts, P.
Streller, F.
Backlund, K.
Karlsson, P. G
Wannberg, B.

The paper presents the development and demonstrates the capabilities of a new laboratory-based environmental X-ray photoelectron spectroscopy system incorporating an electrostatic lens and able to acquire spectra up to 0.4 Torr. The incorporation of a two-dimensional detector provides imaging capabilities and allows the acquisition of angle-resolved data in parallel mode over an angular range of 14° without tilting the sample. The sensitivity and energy resolution of the spectrometer have been investigated by analyzing a standard Ag foil both under high vacuum (10−8 Torr) conditions and at elevated pressures of N2 (0.4 Torr). The possibility of acquiring angle-resolved data at different pressures has been demonstrated by analyzing a silicon/silicon dioxide (Si/SiO2) sample. The collected angle-resolved spectra could be effectively used for the determination of the thickness of the native silicon oxide layer.

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F. Mangolini, J. Åhlund, G. E. Wabiszewski, V. P. Adiga, P. Egberts, F. Streller, K. Backlund, P. G. Karlsson, B. Wannberg, and R. W. Carpick. (2012). Angle-resolved environmental X-ray photoelectron spectroscopy: A new laboratory setup for photoemission studies at pressures up to 0.4 Torr. Review of Scientific Instruments, 83(9), 093112. doi: Copyright 2012 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.
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