Filmetrics Profilm3D (MET-05) Standard Operating Procedure
Loading...
Penn collection
Standard Operating Procedures
Quattrone Nanofabrication Facility
Quattrone Nanofabrication Facility
Degree type
Discipline
Subject
metrology
optical profilometer
3D imaging
nanotechnology
WLI
PSI
Electronic Devices and Semiconductor Manufacturing
Nanotechnology Fabrication
optical profilometer
3D imaging
nanotechnology
WLI
PSI
Electronic Devices and Semiconductor Manufacturing
Nanotechnology Fabrication
Funder
Grant number
Copyright date
Distributor
Related resources
Author
Contributor
Abstract
Standard Operating Procedure for the Filmetrics Profilm3D Optical Profilometer/White Light Interferometer
Advisor
Date Range for Data Collection (Start Date)
Date Range for Data Collection (End Date)
Digital Object Identifier
Series name and number
Publication date
2023-04-01