Al (confocal) deposition rate 1 using Explorer14 magnetron sputterer

Thumbnail Image
Files
Al__confocal__deposition_rate_1_using_Explorer14_magentron_sputterer.pdf (66.52 KB)
Penn collection
Tool Data
Quattrone Nanofabrication Facility
Degree type
Discipline
Subject
Explorer14 aluminum deposition rate
Funder
Grant number
License
http://creativecommons.org/licenses/by-sa/4.0/
Copyright date
Distributor
Related resources
Permalink
https://repository.upenn.edu/handle/20.500.14332/45967
Author
Contributor
Abstract
Advisor
Date Range for Data Collection (Start Date)
Date Range for Data Collection (End Date)
Digital Object Identifier
Series name and number
Publication date
2015-04-27
Volume number
Issue number
Publisher
Publisher DOI
Journal Issue
Comments
Recommended citation
Collection
Reports