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Gopalan, Prashanth
Gopalan, Prashanth
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Gopalan, Prashanth
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Zhao, Lin
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80plus
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ABM3000HR
1
Dry Etching
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Etch rate
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Si
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2015
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Publication
1. Dry Etching of SiO2, SiNx, and Si using 80plus Reactive Ion Etcher
(
2015-05-01
)
Gopalan, Prashanth
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Publication
Performance Check on ABM3000HR Mask Aligner
(
2015-04-21
)
Zhao, Lin
;
Gopalan, Prashanth
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