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Ma, Mingxuan
Ma, Mingxuan
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Ma, Mingxuan
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Yamamoto, Hiromichi
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Electron-beam Lithography
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Silicon Nitride
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2020
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Publication
Progress Report III: Fabrication of Nanopores in Silicon Nitride Membranes using Electron-beam Lithography
(
2020-09-25
)
Ma, Mingxuan
;
Yamamoto, Hiromichi
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This report describes the fabrication of a long-range orderly nanopore structure in free-standing siliconnitride membranes using electron-beam lithography (EBL). The parameter setting and challenges of eachstep are discussed.
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