Videos

SPTS DRIE Tool Training: 02 - Operating The Tool

Title

SPTS DRIE Tool Training: 02 - Operating The Tool

Document Type

Video

Files

Date of this Version

7-15-2020

Comments

SPTS DRIE tool training, part 2 To get started at the QNF, click "Request Access" in the link below: https://iris.nano.upenn.edu/ Singh Center for Nanotechnology: https://www.nano.upenn.edu/ University of Pennsylvania: https://home.www.upenn.edu/ School of Engineering & Applied Sciences: https://www.seas.upenn.edu/

Facility

Quattrone Nanofabrication Facility

Keywords

DRIE, Deep reactive ion etch, STPS, Rapier, Nanofabrication

Streaming Media

SPTS DRIE Tool Training: 02 - Operating The Tool

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